Description
Indium tin oxide (ITO) is the most widely adopted transparent conducting oxide in optoelectronics, offering an outstanding combination of high visible-light transmittance, low electrical resistivity and excellent adhesion to glass and polymer substrates. Our ITO sputtering targets are produced from ultra-high-purity In2O3 and SnO2 powders (typically 90:10 by weight, or to customer specification), which are cold-pressed and sintered in a precisely controlled atmosphere to near-theoretical density.
The manufacturing route yields a uniform grain structure and a highly homogeneous tin distribution, which together minimize nodule formation and arcing during reactive sputtering. The result is a target that sustains stable deposition rates over long production runs, reducing downtime and improving film-to-film consistency for manufacturers of touch sensors, TFT-LCD, OLED panels and photovoltaic electrodes.
Key specifications include a purity of 99.99%, a relative density of 98-99.5%, and resistivity below 1.5 x 10-4 ohm-cm. Films deposited from the target typically reach visible transmittance above 85% and sheet resistance in the range of 10-50 ohm/sq depending on thickness and process parameters. Targets can be supplied as rectangular, circular or customized geometries, with optional backing plates (copper, titanium or stainless steel) and bonding service (indium or epoxy) to match various sputtering systems.
Each batch is accompanied by a certificate of analysis covering composition, density, grain size and mechanical strength. Technical support is available to help customers optimize sputtering parameters, target cleaning and recycling. With consistent quality and dedicated service, our ITO targets are trusted by display, energy and functional-glass manufacturers worldwide.
Because environmental and economic factors increasingly favor recycling, we also offer target remanufacturing programs that recover residual material and restore usable targets at reduced cost, helping customers lower total ownership expense while maintaining process stability and output quality.